Features & Benefits

• 10 Ra microinch internal surface finishes
• Metal to metal seal diaphragm to body seal for high leak integrity
• Full internal electropolish available
• Designed to reduce pressure fluctuations in semiconductor gas systems
• Meets the stringent semiconductor requirements of both point of use and cylinder applications

Specifications

Pressure Rating

Maximum Inlet Pressure: 

600, 3500 PSIG [40, 240 bar]
Outlet Pressure Ranges: 

30, 60, 100, 150 PSIG [2, 4, 7, 10 bar]

 

Material

Body: 316L SST Electropolish, 316L SST Internal Electropolish
Diaphragm: Hastelloy^®
Valve Seat: PCTFE, Teflon^®, Vespel^®
Stem and Valve Spring: 316 Stainless Steel
Remaining Parts: 316 Stainless Steel, Hastelloy^®

 

Operating Temperature

PCTFE Seat: -40°F to +140°F [-40°C to +60°C]
Teflon^® Seat: -40°F to +160°F [-40°C to +71°C]
Vespel^® Seat: -40°F to +350°F [-40°C to +176°C]

 

Port Size & Type

1/4″, 1/2″ VCR^® type tube stubs

 

Flow Capacity

Cv = .15, .06

 

Load Type

Spring

 

Weight

2 lbs [.9 kg]