Tescom 64-3600 Series

Features & Benefits

  • 10 Ra microinch internal surface finishes
  • Metal to metal seal diaphragm to body seal for high leak integrity
  • Full internal electropolish available
  • Designed to reduce pressure fluctuations in semiconductor gas systems
  • Meets the stringent semiconductor requirements of both point of use and cylinder applications


Pressure Rating

Maximum Inlet Pressure: 

600, 3500 PSIG [40, 240 bar]
Outlet Pressure Ranges: 

30, 60, 100, 150 PSIG [2, 4, 7, 10 bar]



Body: 316L SST Electropolish, 316L SST Internal Electropolish
Diaphragm: Hastelloy®
Valve Seat: PCTFE, Teflon®, Vespel®
Stem and Valve Spring: 316 Stainless Steel
Remaining Parts: 316 Stainless Steel, Hastelloy®


Operating Temperature

PCTFE Seat: -40°F to +140°F [-40°C to +60°C]
Teflon® Seat: -40°F to +160°F [-40°C to +71°C]
Vespel® Seat: -40°F to +350°F [-40°C to +176°C]


Port Size & Type

1/4″, 1/2″ VCR® type tube stubs


Flow Capacity

Cv = .15, .06


Load Type




2 lbs [.9 kg]