Features & Benefits
- 10 Ra microinch internal surface finishes
- Metal to metal seal diaphragm to body seal for high leak integrity
- Full internal electropolish available
- Designed to reduce pressure fluctuations in semiconductor gas systems
- Meets the stringent semiconductor requirements of both point of use and cylinder applications
Specifications
Pressure Rating
Maximum Inlet Pressure:
600, 3500 PSIG [40, 240 bar]
Outlet Pressure Ranges:
30, 60, 100, 150 PSIG [2, 4, 7, 10 bar]
Material
Body: 316L SST Electropolish, 316L SST Internal Electropolish
Diaphragm: Hastelloy®
Valve Seat: PCTFE, Teflon®, Vespel®
Stem and Valve Spring: 316 Stainless Steel
Remaining Parts: 316 Stainless Steel, Hastelloy®
Operating Temperature
PCTFE Seat: -40°F to +140°F [-40°C to +60°C]
Teflon® Seat: -40°F to +160°F [-40°C to +71°C]
Vespel® Seat: -40°F to +350°F [-40°C to +176°C]
Port Size & Type
1/4″, 1/2″ VCR® type tube stubs
Flow Capacity
Cv = .15, .06
Load Type
Spring
Weight
2 lbs [.9 kg]