Features & Benefits

• Product of choice for state-of-the-art OEM gas systems
• Ultra-sensitive pressure control – enhances MFC performance
• Superior performance in a wide range of applications
• Flows from 2 sccm to 120 SLPM
• Unsurpassed droop and repeatability in a micro component
• Metal to metal diaphragm to body seal for high leak integrity
• 10 Ra or 5 Ra internal surface finish

Specifications

Pressure Rating

Maximum Inlet Pressure     
150 PSIG [10 bar]
Outlet Pressure Ranges
20″ Hg Vac – 15 PSIG, 30, 60, 100 PSIG [20″ Hg Vac – 1 bar, 2, 4, 7 bar]

 

Material

Body:  316L VAR Stainless Steel
Diaphragm:  Hastelloy^®
Seat:  PCTFE
Valve Stem:  Hastelloy^®
Remaining Materials:  316L VAR Stainless Steel

 

Operating Temperature

-40°F to +140°F [-40°C to +60°C]

 

Port Size & Type

Welded Fittings:  1/4″ VCR^® or Tube Stubs
Surface Mount:  1.125″ or 1.50″ footprint

 

Flow Capacity

Standard:  Cv = .04
High Flow:  Cv = .08

 

Load Type

Hand Load

 

Weight

VCR^®, IGS:  .60 lbs [.27 kg]
A-Style: 1.08 lbs [.49 kg]